Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.165-173, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas. pp.237-244, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas. pp.10-16, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California. pp.52-62, 1997. Bellingham. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Microelectronic Structures and MEMS for Optical Processing III. pp.11-21, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering