1.

Conference Proceedings
Conference Proceedings
1. Estimation of Mechanical Properties of Al/Cu Compound Layer Formed by Impact Welding
Date, H. ; Futakawa, M. ; Naka, M.
Pub. info.: New frontiers of processing and engineering in advanced materials : proceedings of the International Conference on New Frontiers of Process Scinence and Engineering in Advanced Materials : The 14th Iketani Conference, November, 24-26, 2004, held in Kyoto, Japan.  pp.455-460,  2005.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 502
2.

Conference Proceedings
Conference Proceedings
2. A Large Area Multi-Frequency Multi-Planar Coil Inductively Plas- ma Source
Yamada, N. ; Ventzek, P.L.G. ; Date, H. ; Sakai, Y. ; Tagashira, H.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.126-136,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
3.

Conference Proceedings
Conference Proceedings
3. Simulation of Plasma Etch Process Control on Etching Time-Scales: Multi-Coil Control of an Inductively Coupled Plasma Source
Yang, J. ; Yamada, N. ; Ventzek, P.L.G. ; Sakai, Y. ; Date, H. ; Tagashira, H. ; Kitamori, K.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.233-244,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9