1.

Conference Proceedings
Conference Proceedings
1. Scaling self-aligned contacts for 0.25ｦﾌ m and below
Perera,A. ; Pfiester,J.R. ; Lii,T. ; Feng,C. ; Bhat,M. ; Dao,T. ; Molloy,J. ; Blackwell,M. ; J. Cecil,
Pub. info.: Microelectronic Device Technology : 1-2 October 1997, Austin, Texas.  pp.171-175,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3212
2.

Conference Proceedings
Conference Proceedings
2. In-line testing of antenna-type test structures for separation of sources of process-induced damage
Brozek,T. ; Roberts,D. ; Dao,T.
Pub. info.: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing.  pp.101-108,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3215