1.

Conference Proceedings
Conference Proceedings
1. Resonance measurements of stresses in AI/Si3N4 microribbons
Payne,A.P. ; Staker,B.P. ; Gudeman,C.S. ; Daneman,M.J. ; Peter,D.E.
Pub. info.: MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California.  pp.90-100,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3880
2.

Conference Proceedings
Conference Proceedings
2. Actuation of polysilicon surface-micromachined mirrors
Tien,N.C. ; Kiang,M.-H. ; Daneman,M.J. ; Solgaard,O. ; Lau,K.Y. ; Muller,R.S.
Pub. info.: Miniaturized Systems with Micro-Optics and Micromechanics.  pp.53-59,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2687