Dilhac, J.M. ; Cornibert, L. ; Charitat, G. ; Noihier, N. ; Zerrouk, D. ; Ganibal, C.
Pub. info.:
Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices. pp.245-250, 1997. Pennington, NJ. Electrochemical Society
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.319-, 1997. Pittsburgh, PA. MRS - Materials Research Society