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Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium. pp.362-368, 2004. Pennington, N.J.. Electrochemical Society
Chung, U. I. ; Hah, S. R. ; Han, J. H. ; Hong, C. K. ; Kang, G. W. ; Kim, K. H.
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Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.33-44, 2000. Warrendale, PA. Materials Research Society