1.

Conference Proceedings
Conference Proceedings
1. IMPURITY GETTERING BY IMPLANTED CARBON IN SILICON
Wong, H. ; Cheung, N.. W. ; Yu, K. M. ; Chu, P. K. ; Liu, J.
Pub. info.: Ion beam processing of advanced electronic materials : symposium held April 25-27, 1989, San Diego, California, U.S.A..  pp.97-106,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 147
2.

Conference Proceedings
Conference Proceedings
2. Two Step O2/N2O Plasma Annealing for the Reduction of Leakage Current in Amorphous Ta2O5 Films
Lau, W. S. ; Perera, M. T. Chandima ; Han, T. ; Sandler, N. P. ; Tung, C. H. ; Sheng, T. T. ; Chu, P. K. ; Chong, T. C.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.501-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
3.

Conference Proceedings
Conference Proceedings
3. Thermal stability of metal containing diamond-like carbon thin film fabricated by dual plasma deposition (invited Paper)
Fu, R. K. Y. ; Mei, Y. F. ; Fu, M. Y. ; Wei, C. B. ; Siu, G. G. ; Chu, P. K. ; Cheung, W. Y. ; Wong, S. P.
Pub. info.: Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China.  pp.330-335,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5774
4.

Conference Proceedings
Conference Proceedings
4. Plasma-implantation-based surface modification of metals with single-implantation mode (Invited Paper)
Tian, X. B. ; Cui, J. T. ; Yang, S. Q. ; Fu, R. K. Y. ; Chu, P. K.
Pub. info.: Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China.  pp.324-329,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5774
5.

Conference Proceedings
Conference Proceedings
5. Relaxation mechanism of SiGe thin film on SOI substrate
Di, Z. ; Zhang, M. ; Liu, W. ; Zhu, M. ; Lin, C. ; Chu, P. K.
Pub. info.: Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China.  pp.611-615,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5774
6.

Conference Proceedings
Conference Proceedings
6. Formation of gallium nitride (GaN) transition layer by plasma immersion ion implantation and rapid thermal annealing
Kwok, D. T. K. ; Ho, A. H. P. ; Zeng, X. C. ; Chan, C. ; Chu, P. K. ; Wong, S. P.
Pub. info.: Morphological and compositional evolution of heteroepitaxial semiconductor thin films : symposium held April 24-27, 2000, San Francisco, California.  pp.309-,  2000.  Warrendale, Pennsylvania..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 618