1.

Conference Proceedings
Conference Proceedings
1. The Wavefront Analysis of NBUR Nd:YAG Laser Output Beam using a Mach-Zehnder Interferometer,
Choi,S.-H. ; Park,D.-Y. ; Kim,K. ; Lee,S.G.
Pub. info.: Optics for science and new technology : 17th Congress of the International Commission for Optics, August 19-23, 1996, Hotel Riviera(Yusong), Taejon Korea.  Part2  pp.614-615,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2778
2.

Conference Proceedings
Conference Proceedings
2. Accurate overlay control for 0.30-ｦﾌm i-line lithography
Kim,K.-Y. ; Hur,I.-B. ; Jang,G.-J. ; Choi,S.-H.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.379-387,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725