Park, Y-B. ; Rhee, S. ; Choi, J-H. ; Kim, C-W. ; Suok, J. H.
Pub. info.:
Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A.. pp.471-, 1999. Warrendale. MRS - Materials Research Society