1.

Conference Proceedings
Conference Proceedings
1. Aid HfSiO High-k Dielectric and CVD-TaN Metal Gate
Chung, U. I. ; Park, S. G. ; Cho, H. -J. ; Lee, H. L. ; Park, H. B. ; Jeon, T. S. ; Jin, B. J. ; Kang, S. B. ; Shin, Y. G. ; Moon, J. T.
Pub. info.: Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium.  pp.362-368,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-04
2.

Conference Proceedings
Conference Proceedings
2. A study of organic contamination control on photomask surface for 65-nm tech node [5992-114]
Kim, J. M. ; Kang, H. -J. ; Kim, Y. -D. ; Cho, H. -J. ; Choi, S. -S.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59923D-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992