1.

Conference Proceedings
Conference Proceedings
1. Experimental methodology of contact edge roughness on sub-100-nm pattern
Lee, T.Y. ; Ihm, D. ; Kang, H.C. ; Lee, J.B. ; Lee, B.-H. ; Chin, S.-B. ; Cho, D.-H. ; Kim, Y.H. ; Yang, H.D. ; Yang, K.M.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.623-632,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
2.

Conference Proceedings
Conference Proceedings
2. Characteristics of resonant modes of photonic crystal cavities
Park, H.-Y. ; Cho, D.-H. ; Kee, C.-S. ; Kim, K. ; Lim, H.
Pub. info.: Photonic Crystal Materials and Devices II.  pp.400-404,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5360