1.

Conference Proceedings
Conference Proceedings
1. IRON GETTERING EFFICIENCY BY A POLYSILICON LAYER IN P-TYPE CZ SILICON
Lee, D.M. ; Mishra, K. ; Huber, W. ; Chevacharoenkul, S. ; Choi, S.P. ; Doh, I.H.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.820-830,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
2.

Conference Proceedings
Conference Proceedings
2. Ultra Shallow Junctions: Formation, Characterization, and Modeling
Osburn, C.M. ; Chevacharoenkul, S. ; Wang, Q.F. ; Tsai, J.Y. ; Cowen, A. ; Rose, J. ; Zhang, X. ; Kellam, M.
Pub. info.: Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993.  pp.146-157,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-13
3.

Conference Proceedings
Conference Proceedings
3. Deformation Behavior of SiC Whisker Reinforced Si3N4
Nixon, R.D. ; Chevacharoenkul, S. ; Buckabee, M.L. ; Buljan, S.T. ; Davis, B.F.
Pub. info.: Advanced structural ceramics : symposium held December 1-3, 1986, Boston, Massachusetts U.S.A..  pp.295-302,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 78
4.

Conference Proceedings
Conference Proceedings
4. A Technique for Preparing "Two in One" Cross-Sectional TEM Specimens
Ma, G.-H. M. ; Chevacharoenkul, S.
Pub. info.: Specimen preparation for transmission electron microscopy of materials--II : symposium held April 19-20, 1990, San Francisco, California, U.S.A..  pp.235-242,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 199
5.

Conference Proceedings
Conference Proceedings
5. Across wafer focus mapping and its applications in advanced technology nodes [6154-23]
Zhang, G. ; DeMoor, S. ; Jessen, S. ; He, Q. ; Yan, W. ; Chevacharoenkul, S. ; Vellanki, V. ; Reynolds, P. ; Ganeshan, J. ; Hauschild, J. ; Pieters, M.
Pub. info.: Optical Microlithography XIX.  pp.61540N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154