1.

Conference Proceedings
Conference Proceedings
1. Rapid Thermal Silicidation in Silicon-Germanium and SOI Devices
Chen, Li. ; Wu, W.W ; Liu, C.H. ; Chiang, T.F. ; Cheng, S.L. ; Lee, S.W.
Pub. info.: Rapid thermal and other short-time processing technologies III : proceedings of the international symposium.  pp.441-454,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-11
2.

Conference Proceedings
Conference Proceedings
2. Low Resistivity Contacts to Ultra-Shallow Junctions in ULSI Devices
Chen, L.J. ; Cheng, S.L. ; Cheng, L.W.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.237-248,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
3.

Conference Proceedings
Conference Proceedings
3. Structural and Electrical Characteristics of Low Dielectric Cosntant Porous Hydrogen Silsequioxane for Cu Metallization
Wang, J.H. ; Liu, P.T. ; Chang, T.C. ; Chen, W.J. ; Cheng, S.L. ; Lin, J.Y. ; Chen, L.J.
Pub. info.: Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium.  pp.216-223,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-13