1.

Conference Proceedings
Conference Proceedings
1. Silicide Contacts for Sub-0.25 ｦﾌm Devices
Chen, L. J. ; Cheng, S. L. ; Chang, S. M. ; Peng, Y. C. ; Huang, H. Y. ; Cheng, L. W.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.123-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
2.

Conference Proceedings
Conference Proceedings
2. The Influence of Stress on the Growth of Titanium Silicide Thin Films on (001) Silicon Substrates
Cheng, S. L. ; Chang, S. M. ; Huang, H. Y. ; Peng, Y. C. ; Chen, L. J. ; Tsui, B. Y. ; Tsai, C. J. ; Guo, S. S.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.9-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
3.

Conference Proceedings
Conference Proceedings
3. Effects of Size and Shape of Lateral Confinement on the Formation of NiSi2, CoSi2 and TiSi2 on Silicon Inside Miniature Size Oxide Openings
Chen, L. J. ; Yew, J. Y. ; Cheng, S. L. ; Chen, K. M. ; Nakamura, K. ; Tsui, B. Y.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.499-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427