1.

Conference Proceedings
Conference Proceedings
1. ELECTRICAL PROPERTIES OF OXIDE-NITRIDE-OXIDE, ONO, HETEROSTRUCTURES FABRICATED BY LOW TEMPERATURE REMOTE PECVD
Ma, Y. ; Yasuda, T. ; Chen, Y.L. ; Lucovsky, G. ; Maher, D.M.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.147-152,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. A STUDY OF EXTENDED DEFECTS IN SILICON CRYSTALS AFTER EXPOSURE TO A HYDROGEN PLASMA
Chen, Y.L. ; Maher, D.M.
Pub. info.: Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.561-564,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 280
3.

Conference Proceedings
Conference Proceedings
3. ELECTRON MICROSCOPY STUDIES OF UNDOPED AND PHOSPHORUS DOPED Si:H AND Si,C:H FILMS
Chen, Y.L. ; Bentley, J. ; Wang, C. ; Lucovsky, G. ; Maher, D.M.
Pub. info.: Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A..  pp.711-716,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 297
4.

Conference Proceedings
Conference Proceedings
4. PLASMA-SURFACE INTERACTION LIMITS FOR REMOTE H-PLASMA CLEANING OF Si(100)
Schneider, T.P. ; Bernhard, B.L. ; Chen, Y.L. ; Nemanich, R.J.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.213-218,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
5.

Conference Proceedings
Conference Proceedings
5. Influence of Defect Structure on the Electrochemical Behavior of Single Crystal RuO2 Electrodes Prepared by Molecular Beam Epitaxy.
Rieke, P.C. ; Wang, L.-Q. ; Gao, Y. ; Chambers, S.A. ; Liu, J. ; Chen, Y.L. ; Liang, Y.
Pub. info.: Proceedings of the Symposium on Electrochemical Capacitors II.  pp.35-42,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-25
6.

Conference Proceedings
Conference Proceedings
6. New kind of WDM laser source by optical parametric oscillation in aperiodically poled lithium niobate
Wu, F. ; Chen, X.F. ; Xia, Y.X. ; Chen, Y.L.
Pub. info.: Materials and devices for optical and wireless communications : APOC 2002 : Asia-Pacific Optical and Wireless Communications : 15-18 October, 2002, Shanghai, China.  pp.414-422,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4905
7.

Conference Proceedings
Conference Proceedings
7. REDUCTION OF SURFACE ROUGHENING AND SUBSURFACE DEFECTS IN H-PLASMA CLEANING OF Si (100)
Schneider, T.P. ; Montgomery, J.S. ; Ying, H. ; Barnak, J.P. ; Chen, Y.L. ; Maher, D.M. ; Nemanich, R.J.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.329-338,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
8.

Conference Proceedings
Conference Proceedings
8. *TRANSPORT AND MICROSTRUCTURE OF MICROCRYSTALLINE SILICON ALLOYS
Lucovsky, G. ; Wang, C. ; Williams, M.J. ; Chen, Y.L. ; Maher, D.M.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.443-454,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
9.

Conference Proceedings
Conference Proceedings
9. ELECTRICAL PROPERTIES OF BORON-DOPED μc-Si:H PREPARED BY REACTIVE MAGNETRON SPUTTERING FROM c-Si TARGETS
Turner, W.A. ; Williams, M.J. ; Chen, Y.L. ; Maher, D.M. ; Lucovsky, G.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.567-572,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
10.

Conference Proceedings
Conference Proceedings
10. Dynamic Interaction Between a Rigid Body and an Elastic Ring
Chen, Y.L. ; Fox, C.H.J. ; Williams, E.J.
Pub. info.: Proceedings of IMAC-XX : a Conference on Structural Dynamics, February 4-7, 2002, The Westin Los Angeles Airport, Los Angeles, California.  Volume I  pp.867-872,  2002.  Bethel, CT.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4753