1.

Conference Proceedings
Conference Proceedings
1. Thin film 193nm TNK measurement using multi-domain genetic algorithm (MDGA) with a combination of beam profile reflectometry (BPR), absolute ellipsometry (AE), and spectroscopic ellipsometry (SE)
Opsal, J.L. ; Leng, J. ; Ke, C.-M. ; Chen, P.-H. ; Chen, J.-H. ; Ku, Y.-C.
Pub. info.: Advanced characterization techniques for optics, semiconductors, and nanotechnologies : 3-5 August 2003, San Diego, California, USA.  pp.6-18,  2003.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5188
2.

Conference Proceedings
Conference Proceedings
2. Effect of various ArF resist shrinkage amplitudes on CD bias
Ke, C.-M. ; Gau, T.-S. ; Chen, P.-H. ; Yen, A. ; Lin, B.J. ; Otaka, T. ; Iizumi, T. ; Sasada, K. ; Ueda, K.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.997-1006,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689