1.

Conference Proceedings
Conference Proceedings
1. The Effects of Process Variations on Residual Stress Induced by Laser Peening
Rankin, J.E. ; Hill, M.R. ; Halpin, J. ; Chen, H.-L. ; Hackel, L.A. ; Harris, F.
Pub. info.: ECRS 6 : proceedings of the 6th European Conference on Residual Stresses, Coimbra, Portugal, 10-12 July, 2002.  pp.95-100,  2002.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 404-407
2.

Conference Proceedings
Conference Proceedings
2. Metal characterization and process enhancement techniques for photolithographic materials
Ko, F.-H. ; Chen, H.-L. ; Hsu, C.-C. ; Chu, T.-C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.696-705,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689