1.

Conference Proceedings
Conference Proceedings
1. ELECTROCHEMICAL AND RADIOCHEMACAL STUDY OF COPPER CONTAMINATION MECHANISM FROM HF SOLUTIONS ONTO SILICON SUBSTRATES
Bertagna, V. ; Rouelle, F. ; Chemla, M.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.128-135,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings
Conference Proceedings
2. Electrical Characterization of Thin Oxide Layers by Impedance Spectroscopy Using SiliconlOxidefElectrolyte (SOE) Structures
Chemla, M. ; Bertagna, V. ; Erre, R. ; Rouclle, F. ; Petitdidier, S. ; Levy, D.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium.  pp.452-464,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-2
3.

Conference Proceedings
Conference Proceedings
3. Titanium, Boron, and Titanium Diboride Deposition in Alkali Fluorochloride Melts
Lantelme, F. ; Barhoun, A. ; Chemla, M. ; von Barner, J.
Pub. info.: Molten Salts XII : proceedings of the International Symposium.  pp.612-623,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-41
4.

Conference Proceedings
Conference Proceedings
4. ELECTROCHEMICAL STUDY OF ULTRA-THIN SILICON OXIDES
Bertagna, V. ; Erre, R. ; Petitdidier, S. ; Levy, D. ; Chemla, M.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.211-218,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
5.

Conference Proceedings
Conference Proceedings
5. Electrochemistiy of Niobium in Molten Alkali Chlorides and the Influence of Dissolved Fluoride Ions
Chemla, M. ; Lantelme, F. ; Berghoute, Y.
Pub. info.: Proceedings of the Ninth International Symposium on Molten Salts.  pp.514-520,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-13
6.

Conference Proceedings
Conference Proceedings
6. Impedance Diagrams of Semiconductor/Oxide/Electrolyte (SOE) Structures to Derive Equivalent R-C Components of the Semiconductor Space Charge
Chemla, M. ; Bertagna, V. ; Erre, R. ; Ronelle, F. ; Petitdidier, S. ; Levy, D.
Pub. info.: Solid-state ionic devices III, proceedings of the international symposium.  pp.329-339,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-26
7.

Conference Proceedings
Conference Proceedings
7. CO-DEPOSITION MECHANISM OF TRACE Cu AND Fe ON H-Si (100) SURFACE IN BUFFERED FLUORIDE SOLUTIONS
Homma, T. ; Kono, T. ; Osaka, T. ; Chemla, M. ; Bertagna, V.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.110-117,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26