1.

Conference Proceedings
Conference Proceedings
1. TWO DIMENSIONAL NUMERICAL THERMAL ANALYSIS OF SILICON ON INSULATOR RECRYSTALLIZATION PROCESSES BY A MOVING HEAT SOURCE
Chang, C. Y. ; Fang, Y. K. ; Wu, B. S. ; Chen, R. M.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.497-506,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23
2.

Conference Proceedings
Conference Proceedings
2. High barrier height n-GaN schottky diodes with a barrier height of 1.3eV by using sputtered copper metal
Lai, W. C. ; Yokoyama, M. ; Chang, C. Y. ; Guo, J. D. ; Tsang, J. S. ; Chan, S. H. ; Sze, S. M.
Pub. info.: Wide-bandgap semiconductors for high-power, high-frequency, and high temperature applications--1999 : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.523-,  1999.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 572
3.

Conference Proceedings
Conference Proceedings
3. THE SELECTIVITY OF REACTIVE ION ETCH OF Ga0.51In0.49P/GaAS
Wu, J. W. ; Chan, S. H. ; Lin, K. C. ; Chang, C. Y. ; Chang, E. Y.
Pub. info.: Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.755-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 337
4.

Conference Proceedings
Conference Proceedings
4. REACTIVE ION ETCH OF GaAs AND AlGaAs USING BCl3, SiCl4 AND SF6 INSTEAD OF CCl2F2
Wu, J. W. ; Chang, C. Y. ; Lin, K. C. ; Chang, E. Y. ; Hwang, J. H.
Pub. info.: Materials and processes for environmental protection : symposium held April 5-7, 1994, San Francisco, California, U.S.A..  pp.295-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 344
5.

Conference Proceedings
Conference Proceedings
5. IN-SITU TEM OBSERVATION OF ELECTROMIGRATION DAMAGE BY SURFACE OR INTERFACE DIFFUSION IN Al AND Al ALLOY FILMS
Chang, C. Y. ; Vook, R. W.
Pub. info.: Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.125-132,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 225
6.

Technical Paper
Technical Paper
6. Experimental study on convective heat transfer of radial air flow in rotating multi-channels
Hwang, G. J. ; Kuo, C. R. ; Chang, C. Y.
Pub. info.: A.S.M.E. paper.  1995.  New York.  The American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : GT
Ser. no.: 1995
7.

Conference Proceedings
Conference Proceedings
7. Watermark defect formation and removal for immersion lithography [6154-44]
Chang, C. Y. ; Yu, D. C. ; Lin, J. C. H. ; Lin, B. J.
Pub. info.: Optical Microlithography XIX.  pp.615417-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
8.

Conference Proceedings
Conference Proceedings
8. Development of cleaning process for immersion lithography [6154-184]
Chang, C. Y. ; Yu D C ; Lin J C H ; Lin B J
Pub. info.: Optical Microlithography XIX.  pp.61544R-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154