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19 results

Conference Proceedings

1. X-ray Photoemission Spectromicroscopy of GaN and AlGaN

Lorusso, G. F. ; Solak, H. ; Cerrina, F. ; Underwood, J. H. ; Batson, P. J. ; Kim, Y. ; Cho, Y. ; Kisielowski, C. ; Krueger, J. ; Weber, E. R.

Pub. info.:	Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.393-, 1998. Warrendale, Penn.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	512

Conference Proceedings

2. Advanced zone plate microfocusing optics

Lai, B. ; Yun, W. ; Maser, J. ; Cai, Z. ; Rodrigues, W. ; Legnini, D. ; Chen, Z. ; Krasnoperova, A.A. ; Vladimirsky, Y. ; Cerrina, F. ; Di Fabrizio, E. ; Gentili, M.

Pub. info.:	X-ray microfocusing : applications and techniques : 22-23 July 1998, San Diego, California. pp.133-136, 1998. Bellingham, Wash., USA. SPIE
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3449

Conference Proceedings

3. The Limits of Patterning in X-ray Lithography

Cerrina, F.

Pub. info.:	Materials - fabrication and patterning at the nanoscale : Symposium held April 19-20, 1995, San Francisco, California, USA. pp.173-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	380

Conference Proceedings

4. CHARACTERIZATION OF A SILICON NITRIDE MASK MEMBRANE PROCESS

Wells, G. M. ; Reilly, M. ; Nachman, R. ; Cerrina, F. ; Khakani, M. A. El ; Chaker, M.

Pub. info.:	Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.. pp.81-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	306

Conference Proceedings

5. MODELLING PHOTOELECTRON EFFECTS IN X-RAY LITHOGRAPHY

Ocola, L. E. ; Cerrina, F.

Pub. info.:	Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.. pp.47-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	306

Conference Proceedings

6. MATERIALS AND IMAGE FORMATION IN X-RAY LITHOGRAPHY

Cerrina, F. ; Wells, G. M.

Pub. info.:	Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.. pp.19-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	306

Conference Proceedings

7. In-Situ X-ray Photoemission Spectromicroscopy of Electromigration in Patterned Al-Cu Lines With MAXIMUM

Solak, H. H. ; Lorusso, G. F. ; Singh, S. ; Cerrina, F. ; Underwood, J. H. ; Batson, P.

Pub. info.:	Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.39-, 1998. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	516

Conference Proceedings

8. Synchrotron radiation X-ray microdiffraction study of Cu interconnects

Zhang, X. ; Solak, H. ; Cerrina, F. ; Lai, B. ; Cai, Z. ; Ilinski, P. ; Legnini, D. ; Rodrigues, W.

Pub. info.:	Applications of synchrotron radiation techniques to materials science V : sympoisum held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.. pp.259-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	590

Conference Proceedings

9. MAXIMUM AT ALS: A Powerful Tool to Investigate Open Problems in Micro- and Optoelectronics

Lorusso, G. F. ; Solak, H. ; Singh, S. ; Batson, P. J. ; Underwood, J. H. ; Cerrina, F.

Pub. info.:	Applications of synchrotron radiation techniques to materials science IV : sympoisum held April 13-17, 1998, San Francisco, California, U.S.A.. pp.215-, 1998. Warrendale, Penn.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	524

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Conference Proceedings

10. Progress in the fabrication of high-aspect-ratio zone plates by soft x-ray lithography

Divan, R. ; Mancini, D.C. ; Moldovan, N.A. ; Lai, B.P. ; Assoufid, L. ; Leonard, Q.J. ; Cerrina, F.

Pub. info.:	Design and microfabrication of novel x-ray optics : 9 July 2002, Seattle, Wasington, USA. pp.82-91, 2002. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4783

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