1.

Conference Proceedings
Conference Proceedings
1. Isoplanatic and anisoplanatic imaging through turbulence
C.-M. Hung ; C.-C. Yang ; M.A. Plonus
Pub. info.: Optics in atmospheric propagation and random phenomena : 26-27 September 1994, Rome, Italy.  pp.162-168,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2312
2.

Conference Proceedings
Conference Proceedings
2. Effects of laser bandwidth on tool to tool CD matching
B.-Y. Hsueh ; H.-Y. Wu ; L. Jang ; M. Yeh ; C.-C. Yang
Pub. info.: Optical Microlithography XXI.  3  pp.69244K-1-69244K-15,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924