1.

Conference Proceedings
Conference Proceedings
1. Verification of high-transmittance PSM with polarization at 193-nm high-NA system
C. F. Chiu ; C. L. Chen ; J. W. Lee ; W. B. Wu ; C. L. Shih ; F. Y. Chen ; J. P. Lin
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. Highly reliable detection and correction of pinched areas for high transmission phase shift mask
C. L. Chen ; C.-C. Liao ; P.-J. Chou ; C. L. Shih ; S. Shih
Pub. info.: Optical Microlithography XXI.  2  pp.692437-1-692437-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924