1.

Conference Proceedings
Conference Proceedings
1. AN ELECTRICAL CHARACTERIZATION OF SOI FILMS USING DEVICES FORMED BY OXYGEN IMPLANT AND RAPID THERMAL PROCESSING
Whitfield, Jim D. ; Burnham, Marie E. ; Varker, Charles J. ; Wilson, Syd R.
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.241-248,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92
2.

Conference Proceedings
Conference Proceedings
2. A COMPARISON OF RTO AND FURNACE OXIDES
Burnham, Marie E. ; Legge, Ronald N. ; Nulman, Jaim ; Fejes, Peter L. ; Brown, James F.
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.115-120,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92