1.

Conference Proceedings
Conference Proceedings
1. Converting MEMS technology into profits
Bryzek,J.
Pub. info.: Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California.  pp.40-47,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3511
2.

Conference Proceedings
Conference Proceedings
2. Hybrid intergration of light emitters and detectors with SOI-based micro-opto-electro-mechanical systems (MOEMS)
Kubby,J.A. ; Calamita,J. ; Chang,J. ; Chen,J. ; Gulvin,P. ; Lin,C.-C. ; Lofthus,R. ; Nowak,B. ; Su,Y. ; Tran,A. ; Burns,D. ; Bryzek,J. ; Gilbert,J. ; Hsu,C. ; Korsmeyer,T. ; Morris,A.S. ; Plowman,T.E. ; Rabinovich,V.L. ; Daiber,T.D. ; Scharf,B.R.
Pub. info.: Silicon-based and Hybrid Optoelectronics III.  pp.32-45,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4293