1.

Conference Proceedings
Conference Proceedings
1. Manufacturing an advanced process characterization reticle incorporating halftone biasing
Nakagawa,K.H. ; Broeke,D.Van Den ; Chen,J.F. ; Laidig,T.L. ; Wampler,K.E. ; Caldwell,R.F.
Pub. info.: 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany.  pp.129-134,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3665
2.

Conference Proceedings
Conference Proceedings
2. Improved PBS process for e-beam photomask lithography
Shen,W.P. ; Marra,J. ; Broeke,D.Van Den
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.48-66,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884