1.

Conference Proceedings
Conference Proceedings
1. Spectroscopy of Proton Implanted GaN
Weinstein, M. G. ; Stavola, M. ; Song, C. Y. ; Bozdog, C. ; Przbylinska, H. ; Watkins, G. D. ; Pearton, S. J. ; Wilson, R. G.
Pub. info.: GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A..  pp.G5.9.1-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 537
2.

Conference Proceedings
Conference Proceedings
2. FTIR based nondestructive method for metrology of depths in poly silicon-filled trenches
Zaidi, S.H. ; Stojakovic, G. ; Gutmann, A. ; Bozdog, C. ; Mantz, U. ; Charpenay, S.B. ; Rosenthal, P.A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.185-190,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038