1.

Conference Proceedings
Conference Proceedings
1. How to describe polarization influence on imaging (Invited Paper)
Smith, B. W. ; Bourov, A. ; Fan, Y. ; Cropanese, F. ; Hammond, P.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.23-37,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. ILSim: a compact simulation tool for interferometric lithography
Fan, Y. ; Bourov, A. ; Zavyalova, L. ; Zhou, J. ; Estroff, A. ; Lafferty, N. ; Smith, B. W.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1805-1817,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
3.

Conference Proceedings
Conference Proceedings
3. Synthetic defocus in interferometric lithography
Cropanese, F. C. ; Bourov, A. ; Fan, Y. ; Zhou, J. ; Zavyalova, L. ; Smith, B. W.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1769-1779,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
4.

Conference Proceedings
Conference Proceedings
4. Photoresist modulation curves
Bourov, A. ; Fan, Y. ; Cropanese, F. C. ; Smith, B. W.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1762-1768,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
5.

Conference Proceedings
Conference Proceedings
5. Automated aberration extraction using phase wheel targets
Zavyalova, L. ; Bourov, A. ; Smith, B. W.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1728-1737,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
6.

Conference Proceedings
Conference Proceedings
6. Comparison of immersion lithography from projection and interferometric exposure tools [6154-179]
Robertson, S. A. ; Leonard, J. M. ; Smith, B. W. ; Bourov, A.
Pub. info.: Optical Microlithography XIX.  pp.61544N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
7.

Conference Proceedings
Conference Proceedings
7. Experimental measurement of photoresist modulation curves [6154-113]
Bourov, A. ; Robertson, S. A. ; Smith, B. W. ; Slocum, M.
Pub. info.: Optical Microlithography XIX.  pp.61542Z-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
8.

Conference Proceedings
Conference Proceedings
8. Practical approach to full-field wavefront aberration measurement using phase wheel targets [6154-35]
Zavyalova, L. V. ; Smith, B. W. ; Bourov, A. ; Zhang, G. ; Vellanki, V. ; Reynolds, P. ; Flagello, D. G.
Pub. info.: Optical Microlithography XIX.  pp.61540Y-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
9.

Conference Proceedings
Conference Proceedings
9. Effects of beam pointing instability on two-beam interferometric lithography [6154-96]
Fan, Y. ; Bourov, A. ; Slocum, M. ; Smith, B. W.
Pub. info.: Optical Microlithography XIX.  pp.61542L-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
10.

Conference Proceedings
Conference Proceedings
10. Water immersion optical lithography for 45-nm node
Smith, B.W. ; Kang, H. ; Bourov, A. ; Cropanese, F. ; Fan, Y.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.679-689,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040