1.

Conference Proceedings
Conference Proceedings
1. Manufacturing Qualification of an All Dry DeVeil Plasma Process
Dopp, D. ; Mikus, L. ; Horn, A. ; Bersin, R. ; Xu, H. ; Boumerzoug, M.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.100-107,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7
2.

Conference Proceedings
Conference Proceedings
2. A High Selectivity to Low-k Materials Plasma Ashing Process
Boumerzoug, M. ; Xu, H. ; Bersin, R.L.
Pub. info.: Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability.  pp.170-177,  1998.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-6
3.

Conference Proceedings
Conference Proceedings
3. Electron cyclotron resonance CVD of silicon oxynitride for optoelectronic applications
Boudreau, M. ; Boumerzoug, M. ; Kruzelecky, R. V. ; Mascher, P. ; Jessop, P. E. ; Thompson, D. A.
Pub. info.: III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A..  pp.183-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 300
4.

Conference Proceedings
Conference Proceedings
4. Incorporation of Hydrogen in SiO2 and Si3N4 Thin Films Deposited by ECR-CVD
Brown, J. ; Boudreau, M. ; Boumerzoug, M. ; Mascher, P. ; Jackman, T. E. ; Tong, S. Y. ; Haugen, H.
Pub. info.: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.1037-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 378
5.

Conference Proceedings
Conference Proceedings
5. Passivation Studies on AlGaAs Surfaces Suitable for High Power Laser Development
Edirisinghe, C. ; Ruda, H. E. ; Koutzarov, I. ; Liu, Q. ; Jedral, L. ; Boudreau, M. G. ; Boumerzoug, M. ; Brown, J. ; Mascher, P. ; Moore, A. ; Henderson, R.
Pub. info.: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.1007-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 378
6.

Conference Proceedings
Conference Proceedings
6. Decomposition of Tris Dimethylaminosilane in an ECR CVD Reactor
Boudreau, M.G. ; Boumerzoug, M. ; Mascher, P. ; Jossop, P.E.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.536-545,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20