Borionetti, G. ; Porrini, M. ; Geranzani, P. ; Orizio, R. ; Falster, R.
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Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.104-110, 1994. Pennington, NJ. Electrochemical Society
Borionetti, G. ; Falster, R. ; Bertolini, S. ; Cornara, M. ; Olmo, M. ; Chalmers, G. ; Childs, R. ; Marcuccilli, G.
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Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.196-203, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.16-25, 1993. Pennington, NJ. Electrochemical Society
Corradi, A. ; Borzoni, E. ; Godio, P. ; Borionetti, G.
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Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.241-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Lorenzi, G. ; Nguyen, K.H. ; Sanna, C. ; Orizio, R. ; Borionetti, G.
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Process and Materials Characterization and Diagnostics in IC Manufacturing. pp.39-49, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering