1.
|
Conference Proceedings
|
Joo, H.S. ; Seo, D.C. ; Kim, C.M. ; Lim, Y.T. ; Cho, S.D. ; Lee, J.B. ; Song, J.Y. ; Kim, K.M. ; Park, J.H. ; Jung, J.C. ; Shin, K.S. ; Bok, C.K. ; Moon, S.C.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.126-133, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
2.
|
Conference Proceedings
|
Jung, J.C. ; Lee, S.K. ; Lee, W.W. ; Bok, C.K. ; Moon, S.C. ; Shin, K.S.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.63-70, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
3.
|
Conference Proceedings
|
Bok, C.K. ; Kim, S.-K. ; Kim, H.-B. ; Oh, J.-S. ; Ahn, C.-N. ; Shin, K.-S.
Pub. info.: |
Optical Microlithography XV. Part Two pp.810-821, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4691 |
|
4.
|
Conference Proceedings
|
Hwang, Y.S. ; Jung, J.C. ; Ban, K.D. ; Park, S. ; Bok, C.K. ; Moon, S.C. ; Shin, K.S.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.718-723, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
5.
|
Conference Proceedings
|
Lee, G. ; Hwang, Y.S. ; Ban, K.D. ; Bok, C.K. ; Moon, S.C. ; Shin, K.S.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.813-818, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
6.
|
Conference Proceedings
|
Oh, S.K. ; Kim, J.Y. ; Lee, J.W. ; Kim, D. ; Kim, J. ; Lee, G. ; Jung, J.C. ; Bok, C.K. ; Shin, K.S.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.625-632, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
7.
|
Conference Proceedings
|
Kim, J.-W. ; Son, E.-K. ; Lee, S.-H. ; Kim, D. ; Kim, J. ; Lee, G. ; Jung, J.C. ; Bok, C.K. ; Moon, S.C. ; Shin, K.S.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.599-607, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
8.
|
Conference Proceedings
|
Lee, S.-K. ; Jung, J.C. ; Lee, M.S. ; Lee, S.K. ; Kim, S.Y. ; Hwang, Y.-S. ; Bok, C.K. ; Moon, S.-C. ; Shin, K.S. ; Kim, S.-J.
Pub. info.: |
Advances in Resist Technology and Processing XX. 1 pp.166-174, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|
9.
|
Conference Proceedings
|
Joo, H.-S. ; Seo, D.C. ; Kim, C.M. ; Lim, Y.T. ; Cho, S.D. ; Lee, J.B. ; Jeon, H.P. ; Park, J.H. ; Jung, J.C. ; Shin, K.S. ; Bok, C.K. ; Moon, S.-C.
Pub. info.: |
Advances in Resist Technology and Processing XX. 2 pp.725-732, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|
10.
|
Conference Proceedings
|
Choi, Y.-J. ; Kim, J.-. ; Kim, J.-Y. ; Yim, Y.-G. ; Kim, J. ; Jung, J.-C. ; Min, M.-J. ; Bok, C.K. ; Shin, K.-S.
Pub. info.: |
Advances in Resist Technology and Processing XX. 2 pp.781-788, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|