1.

Conference Proceedings
Conference Proceedings
1. Characterization of an inchworm actuator fabricated by polysilicon surface micromachining
Boer,M.P.de ; Luck,D.L. ; Walraven,J.A. ; Redmond,J.M.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.169-180,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
2.

Conference Proceedings
Conference Proceedings
2. Characterization of MEMS microgears rotating up to 360,000 rpm by stroboscopic optoelectronic laser interferometry microscope(SOELIM)methodology
Brown,G.C. ; Pryputniewicz,R.J. ; Boer,M.P.de ; Miller,S.L.
Pub. info.: Laser interferometry X : techniques and analysis : 31 July-1 August 2000, Sandiego, USA.  Part B  pp.592-600,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4101
3.

Conference Proceedings
Conference Proceedings
3. Pulsed-laser-deposited coatings for stiction and wear reduction in MEMS devices
Pelt,J.S. ; Ramsey,M.E. ; Magana,R.,Jr. ; Poindexter,E.,Jr. ; Boer,M.P.de ; LaVan,D.A. ; Dugger,M.T. ; Smith,J.H. ; Durbin,S.M.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.76-84,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
4.

Conference Proceedings
Conference Proceedings
4. Reproducibility data on SUMMiT
Limary,S. ; Stewart,H. ; Irwin,L.W. ; McBrayer,J. ; Sniegowski,J.J. ; Montague,S. ; Smith,J.H. ; Boer,M.P.de ; Jakubczak,J.F.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.102-112,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
5.

Conference Proceedings
Conference Proceedings
5. Interferometric measurement for improved understanding of boundary effects in micromachined beams
Jensen,B.D. ; Bitsie,F. ; Boer,M.P.de
Pub. info.: Materials and Device Characterization in Micromachining II.  pp.61-72,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3875
6.

Conference Proceedings
Conference Proceedings
6. Small-area in-situ MEMS test structure to measure fracture strength by electrostatic probing
Boer,M.P.de ; Jensen,B.D. ; Bitsie,F.
Pub. info.: Materials and Device Characterization in Micromachining II.  pp.97-103,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3875