1.

Conference Proceedings
Conference Proceedings
1. Interferometric testing of EUV lithography cameras
MacDowell,A.A. ; Wood,O.R.,II. ; Bjorkholm,J.E.
Pub. info.: Materials, manufacturing, and measurement for synchrotron radiation mirrors : 30-31 July 1997, San Diego, California.  pp.202-210,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3152
2.

Conference Proceedings
Conference Proceedings
2. EUV scattering and flare of 10X projection cameras
Gullikson,E.M. ; Baker,S.L. ; Bjorkholm,J.E. ; Bokor,J. ; Coldberg,K.A. ; Goldsmith,J.E.M. ; Montcalm,C. ; Naulleau,P. ; Spiller,E.A. ; Stearns,D.G. ; Taylor,J.S. ; Underwood,J.H.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.717-723,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676