1.

Conference Proceedings
Conference Proceedings
1. Optical performance of pivoting micromirrors
Spahn,O.Blum ; Garcia,E.J. ; Esch,V.C. ; Grossetete,G. ; Bitsie,F. ; Mani,S.S. ; Jakubczak,J.F.
Pub. info.: MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA.  pp.283-292,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4561
2.

Conference Proceedings
Conference Proceedings
2. Interferometric measurement for improved understanding of boundary effects in micromachined beams
Jensen,B.D. ; Bitsie,F. ; Boer,M.P.de
Pub. info.: Materials and Device Characterization in Micromachining II.  pp.61-72,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3875
3.

Conference Proceedings
Conference Proceedings
3. Small-area in-situ MEMS test structure to measure fracture strength by electrostatic probing
Boer,M.P.de ; Jensen,B.D. ; Bitsie,F.
Pub. info.: Materials and Device Characterization in Micromachining II.  pp.97-103,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3875