1.

Conference Proceedings
Conference Proceedings
1. Quantum noise and spatial emission properties of RCLEDs
Birkner, R. ; Kaiser, J. ; ElsaBer, W. ; Jung, C.
Pub. info.: Semiconductor Lasers and Laser Dynamics.  pp.444-451,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5452
2.

Conference Proceedings
Conference Proceedings
2. Aerial image measuring system at 193 nm: a tool-to-tool comparison and global CD mapping
Zibold, A. M. ; Schmid, R. ; Bohm, K. ; Birkner, R.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.1083-1090,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
3.

Conference Proceedings
Conference Proceedings
3. Process window enhancement for 45-nm node using alterable transmission phase-shifting materials [6349-19]
Becker, H. ; Renno, M. ; Hess, G. ; Buttgereit, U. ; Koepernik, C. ; Nedelmann, L. ; Irmscher, M. ; Birkner, R. ; Zibold, A. ; Scheruebl, T.
Pub. info.: Photomask Technology 2006.  pp.63490J-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349