1.

Conference Proceedings
Conference Proceedings
1. Approach to CD-SEM metrology utilizing the full waveform signal
McIntosh,J.M. ; Kane,B.C. ; Bindell,J.B. ; Vartuli,C.B.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.51-60,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Conference Proceedings
Conference Proceedings
2. Noncontact ultrasonic ULSI process metrology using ultrafast lasers
Stoner,R.J. ; Morath,C.J. ; Tas,G. ; Sengupta,S.S. ; Merchant,S.M. ; Bindell,J.B. ; Maris,H.J.
Pub. info.: Commercial applications of ultrafast lasers : 29-30 January 1998, San Jose, California.  pp.104-112,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3269
3.

Conference Proceedings
Conference Proceedings
3. Stability of glass probe tips for critical dimension measurement
Griffith,J.E. ; Miller,G.L. ; Hopkins,L.C. ; Bryson,C.E. ; Snyder,E.J. ; Plombon,J.J. ; Vasilyev,L.A. ; Bindell,J.B.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.350-360,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050