1.

Conference Proceedings
Conference Proceedings
1. Curing Study Of Hydrogen Silsesquioxane Under H2N2 Ambient
Donaton, R.A. ; Coenegrachts, B. ; Sleeckx, E. ; Schaekers, M. ; Sophie, G. ; Matsuki, N. ; Baklanov, M.R. ; Struyf, H. ; Lepage, M. ; Vanhaelemeersch, S. ; Beyer, G. ; Stucchi, M. ; De Roest, D. ; Maex, K.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D5.12-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612
2.

Conference Proceedings
Conference Proceedings
2. Properties Of TiN Thin Films Deposited By ALCVD As Barrier For Cu Metallization
Satta, A. ; Beyer, G. ; Maex, K. ; Elers, K. ; Haukka, S. ; Vantomme, A.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D6.5-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612