Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.359-366, 2001. Pennington, N.J.. Electrochemical Society
Colombo, L. ; Visokay, M.R. ; Chambers, J.J. ; Rotondaro, A.L.P. ; Shanware, A. ; Bevan, M.J. ; Bu, H. ; Tsung, L.
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Rapid thermal and other short-time processing technologies III : proceedings of the international symposium. pp.199-206, 2002. Pennington, NJ. Electrochemical Society
Hendrix, B.C. ; Borovik, A.S. ; Wang, Z. ; Xu, C. ; Roeder, J.F. ; Baum, T.H. ; Bevan, M.J. ; Visokay, M.R. ; Chambers, J.J. ; Rotondaro, A.L.P. ; Bu, H. ; Colombo, L.
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Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.273-278, 2002. Warrendale. Materials Research Society