1.

Conference Proceedings
Conference Proceedings
1. An Analysis of Fluorinated Compound Emissions Reduction Technologies and Emission Reduction Goals
Beu, L. ; Brown, P.T.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium.  pp.1-9,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-8
2.

Conference Proceedings
Conference Proceedings
2. Abatement of Greenhouse Gases Using Surface Wave Plasmas
Wofford, B. ; Vartanian, V. ; Beu, L. ; Lii, T. ; Worth, W.F. ; Hartz, C.L. ; Bevan, J.W.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium.  pp.79-94,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-8
3.

Conference Proceedings
Conference Proceedings
3. Litmas Plasma Abatement Long-Term Reliability Test
Vartanian, V. ; Beu, L. ; Stephens, T. ; Rivers, J. ; Perez, B. ; Kiehlbauch, M. ; Tonnisand, E. ; Graves, D.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.9-20,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7
4.

Conference Proceedings
Conference Proceedings
4. Integrating Environment, Safety and Industrial Hygiene in Semiconductor Process Development
Beu, L. ; Mendicino, L.
Pub. info.: Environmental issues in the electronics/semiconductor industries and electrochemical/photochemical methods for pollution abatement.  pp.1-9,  1998.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-5
5.

Conference Proceedings
Conference Proceedings
5. High Density Plasma (HDP) Oxide Etching with Reduced Global Warming Emission Using 2H-Heptafluoropropane
Pruette, L. ; Karecki, S. ; Reif, R. ; Sparks, T. ; Beu, L. ; Vartanian, V.
Pub. info.: Environmental issues in the electronics/semiconductor industries and electrochemical/photochemical methods for pollution abatement.  pp.58-62,  1998.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-5
6.

Conference Proceedings
Conference Proceedings
6. Long-Term Evaluation of a Litmas 'Blue' Inductively-Coupled Plasma Device for Point-of-Use PFC and HFC Abatement
Vartanian, V. ; Beu, L. ; Stephens, T. ; Jewett, R. ; Tonnis, E. ; Graves, D.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium.  pp.103-115,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-8
7.

Conference Proceedings
Conference Proceedings
7. Application of Design for Environment Concepts to the Semiconductor Industry
Beu, L. ; Mendicino, L.
Pub. info.: AIChE NATIONAL MEETING - MARCH 9-13, 1997 - HOUSTON, TX.  1997.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1997
8.

Conference Proceedings
Conference Proceedings
8. PFAS: Treatment Options and Sampling Methods
Raley, B. ; Barbee, K. ; Lovejoy, L. ; Beu, L. ; Vartanian, V. ; Goolsby, B.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.208-217,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15
9.

Conference Proceedings
Conference Proceedings
9. Partnerships to Address EHS Aspects of Chemical Management in the Semiconductor Industry: Lessons from the PFAS Experience
Bowden, M. ; Beu, L. ; Pawsat, S.
Pub. info.: Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium.  pp.200-207,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-15
10.

Conference Proceedings
Conference Proceedings
10. Analysis of IPCC PFC Emissions Estimating Methodology
Beu, L. ; Peterson, J. ; Brown, P.T.
Pub. info.: Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries : proceedings of the fourth International Symposium.  pp.1-8,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-6