1.

Conference Proceedings
Conference Proceedings
1. ELECTROCHEMICAL AND RADIOCHEMACAL STUDY OF COPPER CONTAMINATION MECHANISM FROM HF SOLUTIONS ONTO SILICON SUBSTRATES
Bertagna, V. ; Rouelle, F. ; Chemla, M.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.128-135,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings
Conference Proceedings
2. Electrical Characterization of Thin Oxide Layers by Impedance Spectroscopy Using SiliconlOxidefElectrolyte (SOE) Structures
Chemla, M. ; Bertagna, V. ; Erre, R. ; Rouclle, F. ; Petitdidier, S. ; Levy, D.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium.  pp.452-464,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-2
3.

Conference Proceedings
Conference Proceedings
3. A Neutron Reflectivity Study of Silicon Oxide Thin Films
Bertagna, V. ; Menelle, A. ; Petitdidier, S. ; Levy, D. ; Saboungi, M.-L
Pub. info.: Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium.  pp.525-532,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-2
4.

Conference Proceedings
Conference Proceedings
4. SPECTROSCOPIC AND ELECTROCHEMICAL STUDIES OF THE GROWTH OF CHEMICAL OXIDE IN SC1 AND SC2
Petitdidier, S. ; Guyader, F. ; Barla, K. ; Rouchon, D. ; Rochat, N. ; Erre, R. ; Bertagna, V.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.205-210,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
5.

Conference Proceedings
Conference Proceedings
5. ELECTROCHEMICAL STUDY OF ULTRA-THIN SILICON OXIDES
Bertagna, V. ; Erre, R. ; Petitdidier, S. ; Levy, D. ; Chemla, M.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.211-218,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
6.

Conference Proceedings
Conference Proceedings
6. Impedance Diagrams of Semiconductor/Oxide/Electrolyte (SOE) Structures to Derive Equivalent R-C Components of the Semiconductor Space Charge
Chemla, M. ; Bertagna, V. ; Erre, R. ; Ronelle, F. ; Petitdidier, S. ; Levy, D.
Pub. info.: Solid-state ionic devices III, proceedings of the international symposium.  pp.329-339,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-26
7.

Conference Proceedings
Conference Proceedings
7. CO-DEPOSITION MECHANISM OF TRACE Cu AND Fe ON H-Si (100) SURFACE IN BUFFERED FLUORIDE SOLUTIONS
Homma, T. ; Kono, T. ; Osaka, T. ; Chemla, M. ; Bertagna, V.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.110-117,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
8.

Conference Proceedings
Conference Proceedings
8. Supercapacitors Built from Carbon Nanotube/Polymer Nanocomposites
Bertagna, V. ; Delpeux, S. ; Jurewicz, K. ; Beguin, F. ; Frackowiak, E.
Pub. info.: Solid-state ionic devices III, proceedings of the international symposium.  pp.526-530,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-26