EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado. pp.136-142, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part2 pp.669-678, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.507-514, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering