1.

Conference Proceedings
Conference Proceedings
1. Evaluation of Undercut and Applicability of a Batch HF Vapor Etching System in MEMS Release Etch Processes
Tolomei, J. ; Timon, B. ; Bergman, E.
Pub. info.: Microfabricated systems and MEMS VII : proceedings of the international symposium.  pp.314-323,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-09
2.

Conference Proceedings
Conference Proceedings
2. EVALUATION OF OZONATED WATER SPRAY FOR RESIST CLEANING APPLICATIONS
De Gendt, S. ; Lux, M. ; Claes, M. ; Van Hoeymissen, J. ; Conrad, T. ; Worth, W. ; Lagrange, S. ; Bergman, E. ; Jassal, A.S. ; Mertens, P.W. ; Heyns, M.M.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.391-398,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
3.

Conference Proceedings
Conference Proceedings
3. Characterization of a Batch HF Vapor Processor for MEMS Release Etching
Chiaroni, J. ; Grange, H. ; Pallet, O. ; Bergman, E.
Pub. info.: Microfabricated systems and MEMS VII : proceedings of the international symposium.  pp.127-137,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-09
4.

Conference Proceedings
Conference Proceedings
4. OZONATED HF APPLICATIONS IN A SPRAY PROCESSING
Claes, M. ; Rohr, E. ; De Gendt, S. ; Lagrange, S. ; Bergman, E. ; Heyns, M.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.314-321,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26