1.

Conference Proceedings
Conference Proceedings
1. CORRELATION OF ELECTRICAL, STRUCTURAL, AND OPTICAL PROPERTIES OF ERBIUM IN SILICON
Benton, J.L. ; Eaglesham, D.J. ; Almonte, M. ; Citrin, P.R. ; Marcus, M.A. ; Adler, D.L. ; Jacobson, D.C. ; Poate, J.M.
Pub. info.: Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A..  pp.447-452,  1993.  Pittsburgh, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 298
2.

Conference Proceedings
Conference Proceedings
2. EVALUATION OF PHYSICAL AND ELECTRICAL PROPERTIES OF MOLYBDENUM IN SILICON FOR IC PROCESSING
Benton, J.L. ; Jacobson, D.C. ; Jackson, B. ; Johnson, J.A. ; Eaglesham, D.J. ; Stevie, A. ; Becerro, J.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1213-1223,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
3.

Conference Proceedings
Conference Proceedings
3. Defect Evolution in Ion Implanted Silicon
Benton, J.L. ; Libertino, S. ; Eaglesham, D.J. ; Coffa, S.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.328-340,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
4.

Conference Proceedings
Conference Proceedings
4. Characterization of ion-implanted Si rapidly annealed with incoherent light
Benton, J.L. ; Celler, G.K. ; Jacobson, D.C. ; Kimerling, L.C. ; Lischner, D.J. ; Miller, G.L. ; Robinson, Mc.D.
Pub. info.: Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.765-770,  1982.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 4
5.

Conference Proceedings
Conference Proceedings
5. DETECTION OF PROCESS INDUCED DISLOCATIONS IN SILICON
Benton, J.L. ; Higashi, G.S. ; Boone, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.1117-1122,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
6.

Conference Proceedings
Conference Proceedings
6. The Mechanisms of Iron Gettering in Silicon by Boron Ion-Implantation
Benton, J.L. ; Stolk, P.A. ; Eaglesham, D.J. ; Jacobson, D.C. ; Cheng, J.Y. ; Poate, J.M. ; Myers, S.M. ; Haynes, T.E
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.153-160,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5