1.

Conference Proceedings
Conference Proceedings
1. INVITED: DEFECT MANAGEMENT AND YIELD ENHANCEMENT FOR THE SEMICONDUCTOR INDUSTRY
Bennett, M.H.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.839-849,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
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Conference Proceedings
Conference Proceedings
2. Implementation of Reference Measurement System using CD-AFM
Dixson, R.G. ; Guerry, A. ; Bennett, M.H. ; Vorburger, T.V. ; Bunday, B.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.150-165,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
3.

Conference Proceedings
Conference Proceedings
3. Sidewall structure estimation from CD-SEM for lithographic process control
Bingham, P.R. ; Price, J.R. ; Tobin, K.W., Jr. ; Karnowski, T.P. ; Bennett, M.H. ; Bogardus, E.H. ; Bishop, M.
Pub. info.: Process and Materials Characterization and Diagnostics in IC Manufacturing.  pp.115-126,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5041
4.

Conference Proceedings
Conference Proceedings
4. Photomask dimensional metrology in the SEM: Has anything really changed? (Invited Paper)
Postek, M.T. ; Vladdr, A.E. ; Bennett, M.H.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.293-308,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
5.

Conference Proceedings
Conference Proceedings
5. Preliminary results for mask metrology using spatial heterodyne interferometry
Bingham, P.R. ; Tobin, K. ; Bennett, M.H. ; Marmillion, P.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.1331-1342,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
6.

Conference Proceedings
Conference Proceedings
6. Phase defect detection with spatial heterodyne interferometry
Bingham, P.R. ; Tobin, K.W. ; Bennett, M.H. ; Marmillion, P.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.18-28,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
7.

Conference Proceedings
Conference Proceedings
7. Quantitative profile-shape measurement study on a CD-SEM with application to etch-bias control
Bunday, B.D. ; Bishop, M. ; Bennett, M.H. ; Swyers, J.R. ; Haberman-Golan, Z.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.138-150,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
8.

Conference Proceedings
Conference Proceedings
8. CD reference materials for sub-10th μm applications
Cresswell, M.W. ; Bogardus, E.H. ; de Pinillos, J.V.M. ; Bennett, M.H. ; Allen, R.A. ; Guthrie, W.F. ; Murabito, C.E. ; am Ende, B.A. ; Linholm, L.W.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.116-127,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
9.

Conference Proceedings
Conference Proceedings
9. Toward traceability for at-line AFM dimensional metrology
Dixson, R.G. ; Guerry, A. ; Bennett, M.H. ; Vorburger, T.V. ; Postek, M.T., Jr.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.313-335,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689