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Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part1 pp.272-275, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.232-247, 1999. Pennington, N.J.. SPIE - The International Society for Optical Engineering
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II-VI compounds and semimagnetic semiconductors : joint proceedings of the Third European Workshop on II-VI Compounds, Linz, Austria, 26-28 September 1994, and the Fourth International Workshop on Semimagnetic (Diluted Magnetic) Semiconductors, Linz, Austria, 26-28 September 1994. pp.623-626, 1995. Aedermannsdorf, Switzerland. Trans Tech Publications
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Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA. pp.130-141, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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