1.

Conference Proceedings
Conference Proceedings
1. Photo-Induced CVD of Tantalum Pentoxide Dielectric Films Using an Injection Liquid Source
Zhang, J-Y. ; Boyd, I. W. ; Mooney, M. B. ; Hurley, P. K. ; O'Sullivan, B. J. ; Beechinor, J. T. ; Kelly, P. V. ; Crean, G. M. ; Senateur, J-P.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.397-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
2.

Conference Proceedings
Conference Proceedings
2. REFLECTANCE ANISOTROPY AND SPECTROSCOPIC ELLIPSOMETRY CHARACTERISATION OF WET SILICON WAFER CLEANING
Beechinor, J. T. ; Kelly, P. V. ; Crean, G. M.
Pub. info.: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.59-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 324
3.

Conference Proceedings
Conference Proceedings
3. PHOTOREFLECTANCE CHARACTERISATION OF REACTIVE ION ETCHED SILICON
Murtagh, M. ; Beechinor, J. T. ; Herbert, P. A. F. ; Kelly, P. V. ; Crean, G. M. ; Jeynes, C.
Pub. info.: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.167-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 324
4.

Conference Proceedings
Conference Proceedings
4. Characterization of Process Variables for Ultraviolet Assisted Injection Liquid Source Chemical Vapor Deposition (UVILS-CVD) of Tantalum Pentoxied Films
Beechinor, J. T. ; Mooney, M. B. ; Kelly, P. V. ; Grean, G. M. ; Zhang, J-Y. ; Boyd, I. W. ; Pillous, M. ; Jimenez, C. ; Senateur, J-P.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.509-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
5.

Conference Proceedings
Conference Proceedings
5. Optical and Electrical Characterization Study of SiCl4 Reactive-Io-Etched GaAs
Murtagh, M. ; Ye, Shu-Ren ; Masterson, H. J. ; Beechinor, J. T. ; Crean, G. M. ; Auret, F. D. ; Deenapanray, P. N. K. ; Mayer, W. E. ; Goodman, S. A. ; Myburg, G.
Pub. info.: Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.75-,  1997.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 442
6.

Conference Proceedings
Conference Proceedings
6. Electrical Characterization of Defects Introduced During Plasma-Based Processing of GaAs
Auret, F. D. ; Myburg, G. ; Meyer, W. E. ; Deenapanray, P. N. K. ; Nordhoff, H. ; Murtagh, M. ; Ye, Shu-Ren ; Masterson, H. J. ; Beechinor, J. T. ; Crean, G. M.
Pub. info.: Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.51-,  1997.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 442
7.

Conference Proceedings
Conference Proceedings
7. Characterisation of the Oxidation Kinetics of Thin, Low Temperature, Electroless Plated Copper Films
Beechinor, J. T. ; O'Reilly, M. ; Patterson, J. C. ; Lynch, S. ; Lafferty, E. ; Kelly, P. V. ; Crean, G. M.
Pub. info.: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.353-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 406