1.

Technical Paper

Technical Paper
Reindl, D. T. ; Beckman, W. A. ; Mitchell, J. W. ; Rutland, C. J.
Pub. info.: A.S.M.E. paper.  1991.  New York, NY.  The American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : HT
Ser. no.: 1991
2.

Conference Proceedings

Conference Proceedings
Wei, A. C. ; Dicks, G. A. ; Abdo, A. Y. ; Nellis, G. F. ; Engelstad, R. L. ; Chang, J. ; Lovell, E. G. ; Beckman, W. A.
Pub. info.: 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.155-163,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5504