1.
|
Conference Proceedings
|
Hwang, Y.S. ; Jung, J.C. ; Ban, K.D. ; Park, S. ; Bok, C.K. ; Moon, S.C. ; Shin, K.S.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.718-723, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
2.
|
Conference Proceedings
|
Lee, G. ; Hwang, Y.S. ; Ban, K.D. ; Bok, C.K. ; Moon, S.C. ; Shin, K.S.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.813-818, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|