Micro- and nanofabricated structures and devices for biomedical environmental applications II : 25-26 January 1999, San Jose, California. pp.100-110, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas. pp.40-45, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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