1.

Conference Proceedings
Conference Proceedings
1. Monitoring process-induced oxide breakdown and its correlation to interface traps
Balasinski,A. ; Hodges,R. ; Walters,J. ; Spinner,C.R.
Pub. info.: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing.  pp.109-116,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3215
2.

Conference Proceedings
Conference Proceedings
2. Advanced procedure to evaluate process performance at very low k1 based on device parameters linked to lithography and process data: ？. Verification of cell layout based on integration of optical and electrical simulations
Balasinski,A. ; Iandolo,W. ; Joshi,D. ; Karklin,L. ; Axelrad,V.
Pub. info.: Optical Microlithography XIV.  4346  pp.1514-1521,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346