1.

Conference Proceedings
Conference Proceedings
1. Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
Grill, A. ; Patel, V. ; Rodbell, K.P. ; Huang, E. ; Christiansen, S. ; Baklanov, M.R.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.569-574,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
2.

Conference Proceedings
Conference Proceedings
2. Porosity and Critical Properties of Silica-Based Low-Dielectric-Constant Materials
Baklanov, M.R. ; Travaly, Y. ; Le, Q.T. ; Shamiryan, D. ; Vanhaelemeersch, S.
Pub. info.: Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium.  pp.179-198,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-01
3.

Conference Proceedings
Conference Proceedings
3. Curing Study Of Hydrogen Silsesquioxane Under H2N2 Ambient
Donaton, R.A. ; Coenegrachts, B. ; Sleeckx, E. ; Schaekers, M. ; Sophie, G. ; Matsuki, N. ; Baklanov, M.R. ; Struyf, H. ; Lepage, M. ; Vanhaelemeersch, S. ; Beyer, G. ; Stucchi, M. ; De Roest, D. ; Maex, K.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D5.12-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612
4.

Conference Proceedings
Conference Proceedings
4. Strength-Porosity Relationship Of Nanoporous Mssq Films Characterised By Brillouin Light Scattering And Surface Acoustic Wave Spectroscopy
Flannery, C.M. ; Wittkowski, T. ; Jung, K. ; Hillebrands, B. ; Baklanov, M.R.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.343-348,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
5.

Conference Proceedings
Conference Proceedings
5. Characterization Of Low-k Dielectric Films By Ellipsometric Porosimetry
Baklanov, M.R. ; Mogilnikov, K.P.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D4.2-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612